Two-dimensional periodic arrays of deep nanopores etched in silicon with reactive ions

L.A. Woldering, R.W. Tjerkstra, Henricus V. Jansen, I.D. Setija, Willem L. Vos

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Nov 2006
Event	NanoNed/MicroNed Symposium II 2006 - Eindhoven University of Technology, Eindhoven, Netherlands Duration: 16 Nov 2006 → 17 Nov 2006

Conference	NanoNed/MicroNed Symposium II 2006
Country/Territory	Netherlands
City	Eindhoven
Period	16/11/06 → 17/11/06

Keywords

@conference{b60a5702221343759df4fbeacaaf4aa6,

title = "Two-dimensional periodic arrays of deep nanopores etched in silicon with reactive ions",

keywords = "METIS-233414",

author = "L.A. Woldering and R.W. Tjerkstra and Jansen, \{Henricus V.\} and I.D. Setija and Vos, \{Willem L.\}",

year = "2006",

month = nov,

day = "16",

language = "Undefined",

pages = "--",

note = "NanoNed/MicroNed Symposium II 2006 ; Conference date: 16-11-2006 Through 17-11-2006",

}