Two Dimensional Simulation of Mechanical Stress Evolution and Electromigration in Confined Aluminum Interconnects

V. Petrescu, A.J. Mouthaan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Stress Induced Phenomena in Metallization
    Place of PublicationJapan
    Number of pages7
    Publication statusPublished - 1 Jun 1998


    • METIS-113843

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