Two Dimensional Simulation of Mechanical Stress Evolution and Electromigration in Confined Aluminum Interconnects

V. Petrescu, A.J. Mouthaan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Stress Induced Phenomena in Metallization
Place of Publication	Japan
Pages	329-334
Number of pages	7
Publication status	Published - 1 Jun 1998

Keywords

@inproceedings{79681d7403bb4bc8ba55f893453a0196,

title = "Two Dimensional Simulation of Mechanical Stress Evolution and Electromigration in Confined Aluminum Interconnects",

keywords = "METIS-113843",

author = "V. Petrescu and A.J. Mouthaan",

year = "1998",

month = jun,

day = "1",

language = "Undefined",

isbn = "1-56396-682-4",

pages = "329--334",

booktitle = "Proceedings of the Stress Induced Phenomena in Metallization",

}