Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation

Igor Milov* (Corresponding Author), V. Zhakhovsky, D. Ilnitsky, K. Migdal, V. Khokhlov, Yu. Petrov, N. Inogamov, Vladimir Lipp, Nikita Medvedev, B. Ziaja, Viacheslav V. Medvedev , Igor A. Makhotkin, Eric Louis, F. Bijkerk

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

18 Citations (Scopus)
86 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation'. Together they form a unique fingerprint.

Engineering

Chemistry

Physics