Ultra-high aspect-ratio FinFET technology

Vladimir Jovanović*, Tomislav Suligoj, Mirko Poljak, Yann Civale, Lis K. Nanver

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy