Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/Microwave technology

Lis K. Nanver, Viktor Gonda, Yann Civale, Tom L.M. Scholtes, Luigi La Spina, Hugo Schellevis, Gianpaolo Lorito, Francesco Sarubbi, Miloš Popadié, Koen Buisman, Silvana Milosavljevié, Egbert J.G. Goudena

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Fingerprint Dive into the research topics of 'Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/Microwave technology'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy