Ultra shallow doping by excimer laser drive-in of RPCVD surface deposited arsenic monolayers

Milos Popadic*, Lis K. Nanver, Cleber Biasotto, Viktor Gonda, Johan Van Der Cingel

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)

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Engineering & Materials Science