Ultra-shallow junction formation by outdiffusion from implanted oxide

J. Schmitz*, M. van Gestel, P.A. Stolk, Y.V. Ponomarev, F. Roozeboom, J.G.M. van Berkum, P.C. Zalm, P.H. Woerlee

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)
11 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Ultra-shallow junction formation by outdiffusion from implanted oxide'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry

Physics & Astronomy