TY - JOUR
T1 - Ultra-short-pulsed laser-machined nanogratings of laser-induced periodic surface structures on thin molybdenum layers
AU - Scorticati, D.
AU - Römer, Gerardus Richardus, Bernardus, Engelina
AU - de Lange, D.F.
AU - Huis in 't Veld, Bert
N1 - Open access
PY - 2012
Y1 - 2012
N2 - Large areas of regular diffraction nanogratings were produced consisting of so-called laser-induced periodic surface structures (LIPSS) on thin molybdenum layers (<400 nm ) deposited on a borosilicate glass substrate. The aim was to produce these structures without ablating nor cracking the molybdenum layer. Ultra short laser pulses were applied using a focused Gaussian beam profile. Processing parameters such as laser fluence, pulse overlap, number of overscans, repetition frequency, wavelength and polarization were varied to study the effect on periodicity, height, and especially regularity of the obtained LIPSS. It was found that a careful choice of the correct laser parameters is required to avoid detrimental mechanical stresses, cracking, and delamination during the laser processing of the layer in order to remain in its correct range of ductility as well as to ensure regular LIPSS. A possible photovoltaic application of these nanogratings could be found in texturing of thin film cells to enhance light trapping mechanisms.
AB - Large areas of regular diffraction nanogratings were produced consisting of so-called laser-induced periodic surface structures (LIPSS) on thin molybdenum layers (<400 nm ) deposited on a borosilicate glass substrate. The aim was to produce these structures without ablating nor cracking the molybdenum layer. Ultra short laser pulses were applied using a focused Gaussian beam profile. Processing parameters such as laser fluence, pulse overlap, number of overscans, repetition frequency, wavelength and polarization were varied to study the effect on periodicity, height, and especially regularity of the obtained LIPSS. It was found that a careful choice of the correct laser parameters is required to avoid detrimental mechanical stresses, cracking, and delamination during the laser processing of the layer in order to remain in its correct range of ductility as well as to ensure regular LIPSS. A possible photovoltaic application of these nanogratings could be found in texturing of thin film cells to enhance light trapping mechanisms.
KW - IR-82910
KW - METIS-292104
U2 - 10.1117/1.JNP.6.063528
DO - 10.1117/1.JNP.6.063528
M3 - Article
VL - 6
SP - 1
EP - 11
JO - Journal of nanophotonics
JF - Journal of nanophotonics
SN - 1934-2608
IS - 1
M1 - 063528
ER -