Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation

B. Van Hao, Antonius A.I. Aarnink, Alexeij Y. Kovalgin, Robertus A.M. Wolters

    Research output: Contribution to journal › Article › Academic › peer-review

    6 Citations (Scopus)
    7 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation'. Together they form a unique fingerprint.