Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMs movements

G. Altena, Mindert Dijkstra, Hugo Hoekstra, Paul Lambeck

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationBook of Abstracts 12th European Conference on Integrated Optics (ECIO 05)
    Place of PublicationGrenoble, France
    Pages506-509
    Number of pages4
    Publication statusPublished - 6 Apr 2005
    Event12th European Conference on Integrated Optics, ECIO 2005 - Congress Center WTC Grenoble, Grenoble, France
    Duration: 6 Apr 20058 Apr 2005
    Conference number: 12

    Conference

    Conference12th European Conference on Integrated Optics, ECIO 2005
    Abbreviated titleECIO
    CountryFrance
    CityGrenoble
    Period6/04/058/04/05

    Keywords

    • METIS-228231

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