Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMs movements

G. Altena, Mindert Dijkstra, Hugo Hoekstra, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Book of Abstracts 12th European Conference on Integrated Optics (ECIO 05)
Place of Publication	Grenoble, France
Pages	506-509
Number of pages	4
Publication status	Published - 6 Apr 2005
Event	12th European Conference on Integrated Optics, ECIO 2005 - Congress Center WTC Grenoble, Grenoble, France Duration: 6 Apr 2005 → 8 Apr 2005 Conference number: 12

Conference	12th European Conference on Integrated Optics, ECIO 2005
Abbreviated title	ECIO
Country/Territory	France
City	Grenoble
Period	6/04/05 → 8/04/05

Keywords

@inproceedings{c795fc191bde41b9b628e3fe841a7b84,

title = "Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMs movements",

keywords = "METIS-228231",

author = "G. Altena and Mindert Dijkstra and Hugo Hoekstra and Paul Lambeck",

note = "Paper Thpo33 (abstract) ; null ; Conference date: 06-04-2005 Through 08-04-2005",

year = "2005",

month = apr,

day = "6",

language = "Undefined",

isbn = "No ISBN number",

pages = "506--509",

booktitle = "Book of Abstracts 12th European Conference on Integrated Optics (ECIO 05)",

}

Book of Abstracts 12th European Conference on Integrated Optics (ECIO 05). Grenoble, France, 2005. p. 506-509.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMs movements

AU - Altena, G.

AU - Dijkstra, Mindert

AU - Hoekstra, Hugo

AU - Lambeck, Paul

N1 - Conference code: 12

PY - 2005/4/6

Y1 - 2005/4/6

KW - METIS-228231

M3 - Conference contribution

SN - No ISBN number

SP - 506

EP - 509

BT - Book of Abstracts 12th European Conference on Integrated Optics (ECIO 05)

CY - Grenoble, France

Y2 - 6 April 2005 through 8 April 2005

ER -