Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements

G. Altena, M. Dijkstra, H.J.W.M. Hoekstra, P.V. Lambeck

    Research output: Contribution to conferencePaperAcademicpeer-review

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    Abstract

    Membrane waveguides with a thickness of 100nm, fabricated in SiON technology, have been used for the measuring the deflection of moving parts. The smallest displacement that can be detected is less than a nanometre.
    Original languageEnglish
    Pages506-509
    Number of pages4
    Publication statusPublished - Apr 2005
    Event12th European Conference on Integrated Optics, ECIO 2005 - Congress Center WTC Grenoble, Grenoble, France
    Duration: 6 Apr 20058 Apr 2005
    Conference number: 12

    Conference

    Conference12th European Conference on Integrated Optics, ECIO 2005
    Abbreviated titleECIO
    CountryFrance
    CityGrenoble
    Period6/04/058/04/05

    Keywords

    • IOMS-SNS: SENSORS
    • Membrane waveguide
    • Optical sensing
    • MEMS
    • Evanescent field sensing

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