Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements

G. Altena, M. Dijkstra, H.J.W.M. Hoekstra, P.V. Lambeck

    Research output: Contribution to conference › Paper › Academic › peer-review

    1 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Ultra-thin free-standing Si3N4 membrane waveguides for evanescent sensing of MEMS movements'. Together they form a unique fingerprint.

    Earth & Environmental Sciences