Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

G. Altena; M. Dijkstra; G.  van Elzakker; G.C.F. Venhorst; H.J.W.M. Hoekstra; P.V. Lambeck

Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

G. Altena, M. Dijkstra, G. van Elzakker, G.C.F. Venhorst, H.J.W.M. Hoekstra, P.V. Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE
Subtitle of host publication	Book of Abstracts
Place of Publication	Madrid, Spain
Publisher	Universidad Complutense de Madrid
Pages	57-57
Number of pages	1
Publication status	Published - 4 Apr 2004
Event	7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004 - Madrid, Spain Duration: 4 Apr 2004 → 7 Apr 2004 Conference number: 7

Conference

Conference	7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004
Abbreviated title	Europt(r)ode 2004
Country/Territory	Spain
City	Madrid
Period	4/04/04 → 7/04/04

Cite this

@inproceedings{80e22f730a6f45c0833875ad1baa7927,

title = "Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements",

author = "G. Altena and M. Dijkstra and Elzakker, {G. van} and G.C.F. Venhorst and H.J.W.M. Hoekstra and P.V. Lambeck",

year = "2004",

month = apr,

day = "4",

language = "English",

pages = "57--57",

booktitle = "7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE",

publisher = "Universidad Complutense de Madrid",

address = "Spain",

note = "7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004, Europt(r)ode 2004 ; Conference date: 04-04-2004 Through 07-04-2004",

}

Altena, G, Dijkstra, M, Elzakker, GV, Venhorst, GCF, Hoekstra, HJWM & Lambeck, PV 2004, Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements. in 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE: Book of Abstracts. Universidad Complutense de Madrid, Madrid, Spain, pp. 57-57, 7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004, Madrid, Spain, 4/04/04.

Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements. / Altena, G.; Dijkstra, M.; Elzakker, G. van et al.
7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE: Book of Abstracts. Madrid, Spain: Universidad Complutense de Madrid, 2004. p. 57-57.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

AU - Altena, G.

AU - Dijkstra, M.

AU - Elzakker, G. van

AU - Venhorst, G.C.F.

AU - Hoekstra, H.J.W.M.

AU - Lambeck, P.V.

N1 - Conference code: 7

PY - 2004/4/4

Y1 - 2004/4/4

M3 - Conference contribution

SP - 57

EP - 57

BT - 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE

PB - Universidad Complutense de Madrid

CY - Madrid, Spain

T2 - 7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004

Y2 - 4 April 2004 through 7 April 2004

ER -