Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

G. Altena, Mindert Dijkstra, G. van Elzakker, G.C.F. Venhorst, Hugo Hoekstra, Paul Lambeck

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationBook of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE
    Place of PublicationMadrid, Spain
    PublisherComplutense University, Madrid, Spain
    Pages57-57
    Number of pages1
    ISBN (Print)no isbn number
    Publication statusPublished - 4 Apr 2004
    Event7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004 - Madrid, Spain
    Duration: 4 Apr 20047 Apr 2004
    Conference number: 7

    Conference

    Conference7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004
    Abbreviated titleEuropt(r)ode 2004
    CountrySpain
    CityMadrid
    Period4/04/047/04/04

    Keywords

    • METIS-220726

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