Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

G. Altena; Mindert Dijkstra; G.  van Elzakker; G.C.F. Venhorst; Hugo Hoekstra; Paul Lambeck

Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

G. Altena, Mindert Dijkstra, G. van Elzakker, G.C.F. Venhorst, Hugo Hoekstra, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE
Place of Publication	Madrid, Spain
Publisher	Complutense University, Madrid, Spain
Pages	57-57
Number of pages	1
ISBN (Print)	no isbn number
Publication status	Published - 4 Apr 2004
Event	7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004 - Madrid, Spain Duration: 4 Apr 2004 → 7 Apr 2004 Conference number: 7

Conference

Conference	7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004
Abbreviated title	Europt(r)ode 2004
Country	Spain
City	Madrid
Period	4/04/04 → 7/04/04

Keywords

METIS-220726

Cite this

Altena, G. ; Dijkstra, Mindert ; Elzakker, G. van ; Venhorst, G.C.F. ; Hoekstra, Hugo ; Lambeck, Paul. / Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements. Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE. Madrid, Spain : Complutense University, Madrid, Spain, 2004. pp. 57-57

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title = "Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements",

keywords = "METIS-220726",

author = "G. Altena and Mindert Dijkstra and Elzakker, {G. van} and G.C.F. Venhorst and Hugo Hoekstra and Paul Lambeck",

year = "2004",

month = apr,

day = "4",

language = "Undefined",

isbn = "no isbn number",

pages = "57--57",

booktitle = "Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE",

publisher = "Complutense University, Madrid, Spain",

note = "null ; Conference date: 04-04-2004 Through 07-04-2004",

}

Altena, G, Dijkstra, M, Elzakker, GV, Venhorst, GCF, Hoekstra, H & Lambeck, P 2004, Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements. in Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE. Complutense University, Madrid, Spain, Madrid, Spain, pp. 57-57, 7th European Conference on Optical Chemical Sensors and Biosensors EUROPT(R)ODE 2004, Madrid, Spain, 4/04/04.

Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements. / Altena, G.; Dijkstra, Mindert; Elzakker, G. van; Venhorst, G.C.F.; Hoekstra, Hugo; Lambeck, Paul.

Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE. Madrid, Spain : Complutense University, Madrid, Spain, 2004. p. 57-57.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Ultra-thin freestanding Si3N4 membrane waveguides for application in evanescent field sensing of MEMS movements

AU - Altena, G.

AU - Dijkstra, Mindert

AU - Elzakker, G. van

AU - Venhorst, G.C.F.

AU - Hoekstra, Hugo

AU - Lambeck, Paul

N1 - Conference code: 7

PY - 2004/4/4

Y1 - 2004/4/4

KW - METIS-220726

M3 - Conference contribution

SN - no isbn number

SP - 57

EP - 57

BT - Book of Abstracts 7th European Conference on Optical Sensors and Biosensors EUROPT(R)ODE

PB - Complutense University, Madrid, Spain

CY - Madrid, Spain

Y2 - 4 April 2004 through 7 April 2004

ER -