Ultrahigh-frequency surface acoustic wave generation for acoustic charge transport in silicon

S. Büyükköse, B. Vratzov, Jelle van der Veen, P.V. Santos, Wilfred Gerard van der Wiel

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    Abstract

    We demonstrate piezo-electrical generation of ultrahigh-frequency surface acoustic waves on silicon substrates, using high-resolution UV-based nanoimprint lithography, hydrogen silsequioxane planarization, and metal lift-off. Interdigital transducers were fabricated on a ZnO layer sandwiched between two SiO2 layers on top of a Si substrate. Excited modes up to 23.5 GHz were observed. Depth profile calculations of the piezoelectric field show this multilayer structure to be suitable for acoustic charge transport in silicon at extremely high frequencies with moderate carrier mobility requirements.
    Original languageUndefined
    Pages (from-to)013112
    Number of pages4
    JournalApplied physics letters
    Volume102
    Issue number1
    DOIs
    Publication statusPublished - 9 Jan 2013

    Keywords

    • EWI-24376
    • IR-89198
    • METIS-302679

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