Ultrasharp high-aspect-ratio tetrahedral molded tips

Rolf Vermeer*, Erwin Berenschot, Edin Sarajlic, Niels Tas

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this study, we extend our work on the fabrication of tetrahedral molds in (111) silicon and the fabrication of tips based on those molds. We present multiple strategies to make a range of different structures out of silicon-rich nitride, focusing on an approach that takes advantage of oxidation sharpening to improve both the aspect ratio and the tip radius, as well as to make the fabrication process both more efficient and versatile. In this way, single tips and so-called tripod tips with a radius of less than 3 nm are successfully fabricated and used in an AFM probe to show the functionality of the tips.

Original languageEnglish
Pages (from-to)2811-2823
Number of pages13
JournalSensors and materials
Volume31
Issue number9
DOIs
Publication statusPublished - 2019

Keywords

  • Anisotropic etching
  • High-aspect-ratio tip
  • Microfabrication
  • Oxidation sharpening
  • UT-Gold-D

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