Ultrasharp high-aspect-ratio tetrahedral molded tips

Rolf Vermeer; Erwin Berenschot; Edin Sarajlic; Niels Tas

doi:10.18494/SAM.2019.2255

Ultrasharp high-aspect-ratio tetrahedral molded tips

Rolf Vermeer^*, Erwin Berenschot, Edin Sarajlic, Niels Tas

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this study, we extend our work on the fabrication of tetrahedral molds in (111) silicon and the fabrication of tips based on those molds. We present multiple strategies to make a range of different structures out of silicon-rich nitride, focusing on an approach that takes advantage of oxidation sharpening to improve both the aspect ratio and the tip radius, as well as to make the fabrication process both more efficient and versatile. In this way, single tips and so-called tripod tips with a radius of less than 3 nm are successfully fabricated and used in an AFM probe to show the functionality of the tips.

Original language	English
Pages (from-to)	2811-2823
Number of pages	13
Journal	Sensors and materials
Volume	31
Issue number	9
DOIs	https://doi.org/10.18494/SAM.2019.2255
Publication status	Published - 2019

Keywords

Anisotropic etching
High-aspect-ratio tip
Microfabrication
Oxidation sharpening
UT-Gold-D

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.18494/SAM.2019.2255Licence: CC BY

SM1974Final published version, 3.87 MBLicence: CC BY

Cite this

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title = "Ultrasharp high-aspect-ratio tetrahedral molded tips",

abstract = "The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this study, we extend our work on the fabrication of tetrahedral molds in (111) silicon and the fabrication of tips based on those molds. We present multiple strategies to make a range of different structures out of silicon-rich nitride, focusing on an approach that takes advantage of oxidation sharpening to improve both the aspect ratio and the tip radius, as well as to make the fabrication process both more efficient and versatile. In this way, single tips and so-called tripod tips with a radius of less than 3 nm are successfully fabricated and used in an AFM probe to show the functionality of the tips.",

keywords = "Anisotropic etching, High-aspect-ratio tip, Microfabrication, Oxidation sharpening, UT-Gold-D",

author = "Rolf Vermeer and Erwin Berenschot and Edin Sarajlic and Niels Tas",

note = "Funding Information: This work was supported by NanoNextNL, a micro- and nanotechnology consortium of the Government of the Netherlands and 130 partners. The authors would like to thank Mark Smithers and Henk van Wolferen (MESA+ NanoLab, University of Twente) for their assistance with SEM imaging, and Martin Siekman (MESA+ Institute, University of Twente) for his assistance with AFM imaging. Publisher Copyright: {\textcopyright} MYU K.K.",

year = "2019",

doi = "10.18494/SAM.2019.2255",

language = "English",

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AU - Vermeer, Rolf

AU - Berenschot, Erwin

AU - Sarajlic, Edin

AU - Tas, Niels

N1 - Funding Information: This work was supported by NanoNextNL, a micro- and nanotechnology consortium of the Government of the Netherlands and 130 partners. The authors would like to thank Mark Smithers and Henk van Wolferen (MESA+ NanoLab, University of Twente) for their assistance with SEM imaging, and Martin Siekman (MESA+ Institute, University of Twente) for his assistance with AFM imaging. Publisher Copyright: © MYU K.K.

PY - 2019

Y1 - 2019

N2 - The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this study, we extend our work on the fabrication of tetrahedral molds in (111) silicon and the fabrication of tips based on those molds. We present multiple strategies to make a range of different structures out of silicon-rich nitride, focusing on an approach that takes advantage of oxidation sharpening to improve both the aspect ratio and the tip radius, as well as to make the fabrication process both more efficient and versatile. In this way, single tips and so-called tripod tips with a radius of less than 3 nm are successfully fabricated and used in an AFM probe to show the functionality of the tips.

AB - The fabrication of sharp tips manufactured using silicon or using a silicon mold is a widely used method with a wide range of applications. In this study, we extend our work on the fabrication of tetrahedral molds in (111) silicon and the fabrication of tips based on those molds. We present multiple strategies to make a range of different structures out of silicon-rich nitride, focusing on an approach that takes advantage of oxidation sharpening to improve both the aspect ratio and the tip radius, as well as to make the fabrication process both more efficient and versatile. In this way, single tips and so-called tripod tips with a radius of less than 3 nm are successfully fabricated and used in an AFM probe to show the functionality of the tips.

KW - Anisotropic etching

KW - High-aspect-ratio tip

KW - Microfabrication

KW - Oxidation sharpening

KW - UT-Gold-D

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EP - 2823

JO - Sensors and materials

JF - Sensors and materials

IS - 9

ER -

Ultrasharp high-aspect-ratio tetrahedral molded tips

Abstract

Keywords

UN SDGs

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