Ultrasonic transducer with thermomechanical excitation and piezoresistive detection

Dan S. Popescu, Dan C. Dascalu, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

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    Abstract

    Ultrasonic transducer was fabricated from silicon buckled membrane using a thermo mechanical excitation and piezoresistive detection. The transducer has a 4 mm square silicon membrane, buckled with an initial deflection of 20μm, actuated by dynamically heating an aluminium ring layer, 3μm thick, with a polysilicon ring resistor. Detection is made by measuring the piezoresistive component in the polysilicon layer impedance.
    Original languageUndefined
    Pages85-88
    Number of pages4
    DOIs
    Publication statusPublished - 9 Oct 1996
    Event1996 International Semiconductor Conference, CAS'96. Part 1 (of 2) - Sinaia, Romania
    Duration: 9 Oct 199612 Oct 1996

    Conference

    Conference1996 International Semiconductor Conference, CAS'96. Part 1 (of 2)
    Period9/10/9612/10/96
    Other9-12 Oct 1996

    Keywords

    • EWI-13541
    • IR-55994

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