Abstract
A universal modular fluidic and electronic interfacing platform for microfluid devices has been designed, built and tested. The platform supports interfacing chips with up to 8 fluidic and 72 electrical connections. The current module set consists of a high frequency oscillator module, a charge amplifier module, a resonator actuator module and a weather station module. These modules can be used to characterize e.g. pressure sensors, density sensors and Coriolis mass flow sensors. For latter device, the platform with these modules performs approximately 2.5 times better in lower noise than the conventional setup. Besides, chip packaging is two to three times less labor intensive.
Original language | English |
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Title of host publication | 3rd Conference on MicroFluidic Handling Systems, MFHS 2017 |
Subtitle of host publication | Conference Proceedings |
Editors | Dennis Alveringh |
Place of Publication | Enschede |
Publisher | University of Twente |
Pages | 106-109 |
Number of pages | 4 |
Publication status | Published - 4 Oct 2017 |
Keywords
- Microfluidics
- Chip interfacing
- Sensor characterization
- Micro sensors
- Micro actuators
- Flow sensors
- Pressure sensors
- Density sensors