Abstract
A dedicated microfabricated chip consisting of
artificial hair sensors was realized and used to controllably and reliably investigate viscous coupling between the hair sensors. The experimental results confirm the presence of coupling effects between hair sensors when placed too close to each other. The results present significant insights in optimal array arrangements for high spatial resolution by preservation of the hair-sensors uncoupled (individual) responses.
Original language | Undefined |
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Title of host publication | 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011) |
Publisher | IEEE |
Pages | 652-655 |
Number of pages | 4 |
ISBN (Print) | 978-1-4244-9633-4 |
DOIs | |
Publication status | Published - 23 Jan 2011 |
Event | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24 |
Publication series
Name | |
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Publisher | IEEE |
Conference
Conference | 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 |
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Abbreviated title | MEMS |
Country/Territory | Mexico |
City | Cancun |
Period | 23/01/11 → 27/01/11 |
Keywords
- IR-75967
- METIS-277535
- Artificial Hair Sensors
- EWI-19581
- coupling between hairs
- Viscous coupling
- TST-Life like
- Biomimetics