Use of an XY oscilloscope in interferometric measurements of small displacements

A. van Herk

Research output: Contribution to journalArticleAcademic

6 Citations (Scopus)
15 Downloads (Pure)

Abstract

A laser interferometer for the accurate measurement of displacements is described. The use of an XY oscilloscope leads to a simple design and an easy adjustment of the interferometer and improves the resolution of the system to about 4 nm.
Original languageEnglish
Pages (from-to)612-613
JournalJournal of physics E: scientific instruments
Volume6
Issue number7
DOIs
Publication statusPublished - 1973
Externally publishedYes

Keywords

  • IR-60481

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