Use of an XY oscilloscope in interferometric measurements of small displacements

A. van Herk

doi:10.1088/0022-3735/6/7/009

Use of an XY oscilloscope in interferometric measurements of small displacements

A. van Herk

Research output: Contribution to journal › Article › Academic

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Abstract

A laser interferometer for the accurate measurement of displacements is described. The use of an XY oscilloscope leads to a simple design and an easy adjustment of the interferometer and improves the resolution of the system to about 4 nm.

Original language	English
Pages (from-to)	612-613
Journal	Journal of physics E: scientific instruments
Volume	6
Issue number	7
DOIs	https://doi.org/10.1088/0022-3735/6/7/009
Publication status	Published - 1973
Externally published	Yes

Keywords

IR-60481

Access to Document

10.1088/0022-3735/6/7/009

VanHerk1973useFinal published version, 242 KB

Cite this

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title = "Use of an XY oscilloscope in interferometric measurements of small displacements",

abstract = "A laser interferometer for the accurate measurement of displacements is described. The use of an XY oscilloscope leads to a simple design and an easy adjustment of the interferometer and improves the resolution of the system to about 4 nm.",

keywords = "IR-60481",

author = "{van Herk}, A.",

year = "1973",

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language = "English",

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pages = "612--613",

journal = "Journal of physics E: scientific instruments",

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AU - van Herk, A.

PY - 1973

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U2 - 10.1088/0022-3735/6/7/009

DO - 10.1088/0022-3735/6/7/009

M3 - Article

SN - 0022-3735

VL - 6

SP - 612

EP - 613

JO - Journal of physics E: scientific instruments

JF - Journal of physics E: scientific instruments

IS - 7

ER -

Use of an XY oscilloscope in interferometric measurements of small displacements

Abstract

Keywords

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Cite this