Using diffraction to detect deflection of the cantilevers in an array

O. Pjetri, W.W. Koelmans, Leon Abelmann, Martin Herman Siekman, Michael Curt Elwenspoek

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    We present an optical technique to detect cantilever deflection of an array using Fraunhofer diffraction patterns. Application areas include probe-based data storage. Intensity profiles of different cantilever arrays are captured on a CCD camera and compared with our model. These measurements are in excellent agreement with the Fraunhofer theory, less than 3% deviation is found. Each cantilever can either be deflected by a fixed amount or undeflected. Based on noise measurements on our setup and intensity patterns simulations, we predict that this method allows the measurement of 1nm deflections in an array of six cantilevers with an SNR of 35dB.
    Original languageUndefined
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
    Place of PublicationNorway
    PublisherVestfold University College
    Number of pages4
    ISBN (Print)978-82-7860-224-9
    Publication statusPublished - 2011
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
    Duration: 19 Jun 201122 Jun 2011
    Conference number: 22

    Publication series

    PublisherVestfold University College, Department of Micro and Nano Systems Technology


    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
    Abbreviated titleMME


    • METIS-285018
    • Cantilever array
    • IR-79400
    • TST-Stobots: Storage Robots
    • diffraction
    • EWI-21310
    • Optical readout
    • Probe Storage

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