Using diffraction to detect deflection of the cantilevers in an array

O. Pjetri; W.W. Koelmans; Leon Abelmann; Martin Herman Siekman; Michael Curt Elwenspoek

Using diffraction to detect deflection of the cantilevers in an array

O. Pjetri, W.W. Koelmans, Leon Abelmann, Martin Herman Siekman, Michael Curt Elwenspoek

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Abstract

We present an optical technique to detect cantilever deflection of an array using Fraunhofer diffraction patterns. Application areas include probe-based data storage. Intensity profiles of different cantilever arrays are captured on a CCD camera and compared with our model. These measurements are in excellent agreement with the Fraunhofer theory, less than 3% deviation is found. Each cantilever can either be deflected by a fixed amount or undeflected. Based on noise measurements on our setup and intensity patterns simulations, we predict that this method allows the measurement of 1nm deflections in an array of six cantilevers with an SNR of 35dB.

Original language	Undefined
Title of host publication	Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of Publication	Norway
Publisher	Vestfold University College
Pages	278-281
Number of pages	4
ISBN (Print)	978-82-7860-224-9
Publication status	Published - 2011
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22

Publication series

Name
Publisher	Vestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated title	MME
Country/Territory	Norway
City	Tønsberg
Period	19/06/11 → 22/06/11

Keywords

METIS-285018
Cantilever array
IR-79400
TST-Stobots: Storage Robots
diffraction
EWI-21310
Optical readout
Probe Storage

Access to Document

Cite this

@inproceedings{9157bf2cd3da4730bff7712557fa0a0d,

title = "Using diffraction to detect deflection of the cantilevers in an array",

abstract = "We present an optical technique to detect cantilever deflection of an array using Fraunhofer diffraction patterns. Application areas include probe-based data storage. Intensity profiles of different cantilever arrays are captured on a CCD camera and compared with our model. These measurements are in excellent agreement with the Fraunhofer theory, less than 3% deviation is found. Each cantilever can either be deflected by a fixed amount or undeflected. Based on noise measurements on our setup and intensity patterns simulations, we predict that this method allows the measurement of 1nm deflections in an array of six cantilevers with an SNR of 35dB.",

keywords = "METIS-285018, Cantilever array, IR-79400, TST-Stobots: Storage Robots, diffraction, EWI-21310, Optical readout, Probe Storage",

author = "O. Pjetri and W.W. Koelmans and Leon Abelmann and Siekman, {Martin Herman} and Elwenspoek, {Michael Curt}",

note = "http://www.mme2011.org/MME2011_Proceedings.pdf; 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 ; Conference date: 19-06-2011 Through 22-06-2011",

year = "2011",

language = "Undefined",

isbn = "978-82-7860-224-9",

publisher = "Vestfold University College",

pages = "278--281",

booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

}

Pjetri, O, Koelmans, WW, Abelmann, L, Siekman, MH & Elwenspoek, MC 2011, Using diffraction to detect deflection of the cantilevers in an array. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Vestfold University College, Norway, pp. 278-281, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

TY - GEN

T1 - Using diffraction to detect deflection of the cantilevers in an array

AU - Pjetri, O.

AU - Koelmans, W.W.

AU - Abelmann, Leon

AU - Siekman, Martin Herman

AU - Elwenspoek, Michael Curt

N1 - Conference code: 22

PY - 2011

Y1 - 2011

N2 - We present an optical technique to detect cantilever deflection of an array using Fraunhofer diffraction patterns. Application areas include probe-based data storage. Intensity profiles of different cantilever arrays are captured on a CCD camera and compared with our model. These measurements are in excellent agreement with the Fraunhofer theory, less than 3% deviation is found. Each cantilever can either be deflected by a fixed amount or undeflected. Based on noise measurements on our setup and intensity patterns simulations, we predict that this method allows the measurement of 1nm deflections in an array of six cantilevers with an SNR of 35dB.

AB - We present an optical technique to detect cantilever deflection of an array using Fraunhofer diffraction patterns. Application areas include probe-based data storage. Intensity profiles of different cantilever arrays are captured on a CCD camera and compared with our model. These measurements are in excellent agreement with the Fraunhofer theory, less than 3% deviation is found. Each cantilever can either be deflected by a fixed amount or undeflected. Based on noise measurements on our setup and intensity patterns simulations, we predict that this method allows the measurement of 1nm deflections in an array of six cantilevers with an SNR of 35dB.

KW - METIS-285018

KW - Cantilever array

KW - IR-79400

KW - TST-Stobots: Storage Robots

KW - diffraction

KW - EWI-21310

KW - Optical readout

KW - Probe Storage

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 278

EP - 281

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

PB - Vestfold University College

CY - Norway

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -