Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR

Hendrik Willem Lokhorst; Robbert W.E. van de Kruijs; Igor A. Makhotkin; Matthias Schlottbom; Marcelo Ackermann

Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 13 Oct 2025
Event	8th PTB-Seminar on VUV and EUV Metrology 2025 - Helmholtz-Building of the Berlin-Charlottenburg campus, Berlin, Germany Duration: 13 Oct 2025 → 15 Oct 2025 Conference number: 8 https://conferences.ptb.de/event/10/

Seminar

Seminar	8th PTB-Seminar on VUV and EUV Metrology 2025
Country/Territory	Germany
City	Berlin
Period	13/10/25 → 15/10/25
Internet address	https://conferences.ptb.de/event/10/

Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR
Lokhorst, H. W., van de Kruijs, R. W. E., Makhotkin, I. A., Schlottbom, M. & Ackermann, M., 20 Jan 2026.
Research output: Contribution to conference › Poster › Academic

Cite this

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title = "Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR",

author = "Lokhorst, \{Hendrik Willem\} and \{van de Kruijs\}, \{Robbert W.E.\} and Makhotkin, \{Igor A.\} and Matthias Schlottbom and Marcelo Ackermann",

year = "2025",

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language = "English",

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T1 - Using Monte Carlo-based Uncertainty Quantification for Free-Form XRR

AU - Lokhorst, Hendrik Willem

AU - van de Kruijs, Robbert W.E.

AU - Makhotkin, Igor A.

AU - Schlottbom, Matthias

AU - Ackermann, Marcelo

N1 - Conference code: 8

PY - 2025/10/13

Y1 - 2025/10/13

M3 - Poster

T2 - 8th PTB-Seminar on VUV and EUV Metrology 2025

Y2 - 13 October 2025 through 15 October 2025

ER -