Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications

R.E. Oosterbroek; J.W. Berenschot; S. Schlautmann; T.S.J. Lammerink; A. van den Berg; M.C. Elwenspoek

doi:10.1007/978-94-011-5286-0_33

Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications

R.E. Oosterbroek, J.W. Berenschot, S. Schlautmann, T.S.J. Lammerink, A. van den Berg, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

In this paper, new possibilities are shown to fabricate micro structures with use of a simple anisotropic wet chemical etching method. The method is very accurate, cheap and puts low demands on cleanroom facilities. Due to the possibility to obtain structures like valves which have their entrance and exit channels in one wafer in-line, the method might be very valuable for integration of different fluid handling components such as valves, channels and pumps. Several structures are fabricated and a summation of other possible designs is given. These show that exploitation of the well-known anisotropic etching methods in alkaline solutions can result in more sophisticated structures than used up to now.

Original language	English
Title of host publication	Micro Total Analysis Systems ’98
Subtitle of host publication	Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998
Editors	D. Jed Harrison, Albert van den Berg
Publisher	Kluwer Academic Publishers
Pages	137-140
ISBN (Electronic)	978-94-011-5286-0
ISBN (Print)	978-94-010-6225-1
DOIs	https://doi.org/10.1007/978-94-011-5286-0_33
Publication status	Published - 25 Mar 1998
Event	3rd International Workshop on Micro Total Analysis Systems, μTAS 1998 - Banff, Canada Duration: 13 Oct 1998 → 16 Oct 1998 Conference number: 3

Workshop

Workshop	3rd International Workshop on Micro Total Analysis Systems, μTAS 1998
Abbreviated title	MicroTAS
Country/Territory	Canada
City	Banff
Period	13/10/98 → 16/10/98

Keywords

IR-16132
METIS-113017

Access to Document

10.1007/978-94-011-5286-0_33

Cite this

Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1998). Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. In D. J. Harrison, & A. van den Berg (Eds.), Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998 (pp. 137-140). Kluwer Academic Publishers. https://doi.org/10.1007/978-94-011-5286-0_33

Oosterbroek, R.E. ; Berenschot, J.W. ; Schlautmann, S. et al. / Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. editor / D. Jed Harrison ; Albert van den Berg. Kluwer Academic Publishers, 1998. pp. 137-140

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title = "Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications",

abstract = "In this paper, new possibilities are shown to fabricate micro structures with use of a simple anisotropic wet chemical etching method. The method is very accurate, cheap and puts low demands on cleanroom facilities. Due to the possibility to obtain structures like valves which have their entrance and exit channels in one wafer in-line, the method might be very valuable for integration of different fluid handling components such as valves, channels and pumps. Several structures are fabricated and a summation of other possible designs is given. These show that exploitation of the well-known anisotropic etching methods in alkaline solutions can result in more sophisticated structures than used up to now.",

keywords = "IR-16132, METIS-113017",

author = "R.E. Oosterbroek and J.W. Berenschot and S. Schlautmann and T.S.J. Lammerink and {van den Berg}, A. and M.C. Elwenspoek",

year = "1998",

month = mar,

day = "25",

doi = "10.1007/978-94-011-5286-0_33",

language = "English",

isbn = "978-94-010-6225-1",

pages = "137--140",

editor = "Harrison, {D. Jed} and {van den Berg}, Albert",

booktitle = "Micro Total Analysis Systems {\textquoteright}98",

publisher = "Kluwer Academic Publishers",

address = "Netherlands",

note = "3rd International Workshop on Micro Total Analysis Systems, μTAS 1998, MicroTAS ; Conference date: 13-10-1998 Through 16-10-1998",

}

Oosterbroek, RE, Berenschot, JW , Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1998, Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. in DJ Harrison & A van den Berg (eds), Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Kluwer Academic Publishers, pp. 137-140, 3rd International Workshop on Micro Total Analysis Systems, μTAS 1998, Banff, Canada, 13/10/98. https://doi.org/10.1007/978-94-011-5286-0_33

Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. / Oosterbroek, R.E.; Berenschot, J.W.; Schlautmann, S. et al.
Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. ed. / D. Jed Harrison; Albert van den Berg. Kluwer Academic Publishers, 1998. p. 137-140.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications

AU - Oosterbroek, R.E.

AU - Berenschot, J.W.

AU - Schlautmann, S.

AU - Lammerink, T.S.J.

AU - van den Berg, A.

AU - Elwenspoek, M.C.

N1 - Conference code: 3

PY - 1998/3/25

Y1 - 1998/3/25

N2 - In this paper, new possibilities are shown to fabricate micro structures with use of a simple anisotropic wet chemical etching method. The method is very accurate, cheap and puts low demands on cleanroom facilities. Due to the possibility to obtain structures like valves which have their entrance and exit channels in one wafer in-line, the method might be very valuable for integration of different fluid handling components such as valves, channels and pumps. Several structures are fabricated and a summation of other possible designs is given. These show that exploitation of the well-known anisotropic etching methods in alkaline solutions can result in more sophisticated structures than used up to now.

AB - In this paper, new possibilities are shown to fabricate micro structures with use of a simple anisotropic wet chemical etching method. The method is very accurate, cheap and puts low demands on cleanroom facilities. Due to the possibility to obtain structures like valves which have their entrance and exit channels in one wafer in-line, the method might be very valuable for integration of different fluid handling components such as valves, channels and pumps. Several structures are fabricated and a summation of other possible designs is given. These show that exploitation of the well-known anisotropic etching methods in alkaline solutions can result in more sophisticated structures than used up to now.

KW - IR-16132

KW - METIS-113017

U2 - 10.1007/978-94-011-5286-0_33

DO - 10.1007/978-94-011-5286-0_33

M3 - Conference contribution

SN - 978-94-010-6225-1

SP - 137

EP - 140

BT - Micro Total Analysis Systems ’98

A2 - Harrison, D. Jed

A2 - van den Berg, Albert

PB - Kluwer Academic Publishers

T2 - 3rd International Workshop on Micro Total Analysis Systems, μTAS 1998

Y2 - 13 October 1998 through 16 October 1998

ER -

Oosterbroek RE, Berenschot JW , Schlautmann S, Lammerink TSJ, van den Berg A, Elwenspoek MC. Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications. In Harrison DJ, van den Berg A, editors, Micro Total Analysis Systems ’98: Proceedings of the uTAS ’98 Workshop, held in Banff, Canada, 13–16 October 1998. Kluwer Academic Publishers. 1998. p. 137-140 doi: 10.1007/978-94-011-5286-0_33

Utilizing the {111} Plane Switch-Over Etching Process for Micro Fluid Control Applications

Abstract

Workshop

Keywords

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