UV spectral filtering by surface structures multilayer mirrors

Qiushi Huang, D.M. Paardekooper, E. Zoethout, Viacheslav Medvedev, Robbert Wilhelmus Elisabeth van de Kruijs, J. Bosgra, Eric Louis, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Abstract

A surface structured extreme ultraviolet multilayer mirror was developed showing full band suppression of UV (
Original languageEnglish
Pages (from-to)1185-1188
Number of pages4
JournalOptics letters
Volume39
Issue number5
DOIs
Publication statusPublished - 2014

Keywords

  • METIS-302949
  • IR-89838

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