Vacuum annealing phenomena in ultrathin TiDy/Pd bi-layer films evaporated on Si(100) as studied by TEM and XPS

Enrico G. Keim, W.F. Lisowski

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 8 Nov 2009
    Event56th AVS International Symposium & Exhibition 2009 - San Jose, United States
    Duration: 8 Nov 200913 Nov 2009

    Conference

    Conference56th AVS International Symposium & Exhibition 2009
    CountryUnited States
    CitySan Jose
    Period8/11/0913/11/09

    Keywords

    • METIS-261691

    Cite this

    Keim, E. G., & Lisowski, W. F. (2009). Vacuum annealing phenomena in ultrathin TiDy/Pd bi-layer films evaporated on Si(100) as studied by TEM and XPS. -. Poster session presented at 56th AVS International Symposium & Exhibition 2009, San Jose, United States.