Vacuum performance and control of a MEMS stage with integrated thermal position sensor

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings of the 14th EUSPEN International Conference
Place of Publication	Dubrovnik, Croatia
Pages	435-438
Publication status	Published - 2 Jun 2014
Event	14th EUSPEN International Conference 2014 - Dubrovnik, Croatia Duration: 2 Jun 2014 → 6 Jun 2014 Conference number: 14

Conference	14th EUSPEN International Conference 2014
Abbreviated title	EUSPEN
Country	Croatia
City	Dubrovnik
Period	2/06/14 → 6/06/14

Cite this

Krijnen, B., & Brouwer, D. M. (2014). Vacuum performance and control of a MEMS stage with integrated thermal position sensor. In Proceedings of the 14th EUSPEN International Conference (pp. 435-438). Dubrovnik, Croatia.

@inproceedings{87435d837f33427c9fb0ceea95d31d8c,

title = "Vacuum performance and control of a MEMS stage with integrated thermal position sensor",

keywords = "IR-104706, METIS-305582",

author = "B. Krijnen and Brouwer, {Dannis Michel}",

note = "Best Paper Award",

year = "2014",

month = "6",

day = "2",

language = "English",

pages = "435--438",

booktitle = "Proceedings of the 14th EUSPEN International Conference",

}