Vacuum performance and control of a MEMS stage with integrated thermal position sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 14th EUSPEN International Conference
Place of PublicationDubrovnik, Croatia
Pages435-438
Publication statusPublished - 2 Jun 2014
Event14th EUSPEN International Conference 2014 - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14

Conference

Conference14th EUSPEN International Conference 2014
Abbreviated titleEUSPEN
CountryCroatia
CityDubrovnik
Period2/06/146/06/14

Keywords

  • IR-104706
  • METIS-305582

Cite this

Krijnen, B., & Brouwer, D. M. (2014). Vacuum performance and control of a MEMS stage with integrated thermal position sensor. In Proceedings of the 14th EUSPEN International Conference (pp. 435-438). Dubrovnik, Croatia.