Vacuum performance and control of a MEMS stage with integrated thermal position sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 14th EUSPEN International Conference
Place of PublicationDubrovnik, Croatia
Pages435-438
Publication statusPublished - 2 Jun 2014
Event14th EUSPEN International Conference 2014 - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14

Conference

Conference14th EUSPEN International Conference 2014
Abbreviated titleEUSPEN
CountryCroatia
CityDubrovnik
Period2/06/146/06/14

Keywords

  • IR-104706
  • METIS-305582

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