Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

A.J. Nijdam, Johan W. Berenschot, J. van Suchtelen, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
Place of PublicationUlvik, Norway
Pages74-77
Publication statusPublished - 3 Jun 1998
Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
Duration: 3 Jun 19985 Jun 1998
Conference number: 9

Conference

Conference9th Micromechanics Europe Workshop, MME 1998
Abbreviated titleMME
CountryNorway
CityUlvik
Period3/06/985/06/98

Keywords

  • METIS-112904
  • IR-16022

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