Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

A.J. Nijdam, Johan W. Berenschot, J. van Suchtelen, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Micromechanics Europe 1998 Conference (MME)
Place of Publication	Ulvik, Norway
Pages	74-77
Publication status	Published - 3 Jun 1998
Event	9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9

Conference	9th Micromechanics Europe Workshop, MME 1998
Abbreviated title	MME
Country/Territory	Norway
City	Ulvik
Period	3/06/98 → 5/06/98

Keywords

@inproceedings{a5b3947c7669428893bb4deb98a5ddc0,

title = "Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates",

keywords = "METIS-112904, IR-16022",

author = "A.J. Nijdam and Berenschot, {Johan W.} and {van Suchtelen}, J. and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "3",

language = "Undefined",

pages = "74--77",

booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

note = "9th Micromechanics Europe Workshop, MME 1998 ; Conference date: 03-06-1998 Through 05-06-1998",

}

Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. / Nijdam, A.J.; Berenschot, Johan W.; van Suchtelen, J. et al.
Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. p. 74-77.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

AU - Nijdam, A.J.

AU - Berenschot, Johan W.

AU - van Suchtelen, J.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 9

PY - 1998/6/3

Y1 - 1998/6/3

KW - METIS-112904

KW - IR-16022

M3 - Conference contribution

SP - 74

EP - 77

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

T2 - 9th Micromechanics Europe Workshop, MME 1998

Y2 - 3 June 1998 through 5 June 1998

ER -