Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

A.J. Nijdam, Johan W. Berenschot, J. van Suchtelen, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{ad67b9f6a9744f12b6e5295e02777e7e,

title = "Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates",

keywords = "METIS-114668",

author = "A.J. Nijdam and Berenschot, {Johan W.} and {van Suchtelen}, J. and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}