Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie

Alexey Kuznetsov (Inventor), Michael Gleeson (Inventor), Robbert Wilhelmus Elisabeth van de Kruijs (Inventor), Frederik Bijkerk (Inventor)

Research output: Patent

Keywords

@misc{0989fe0d37c641f98d0f6e763dbdca5d,

title = "Verfahren zur Herstellung eines reflektiven optischen Elements f{\"u}r die EUV-Lithographie",

keywords = "METIS-304931",

author = "Alexey Kuznetsov and Michael Gleeson and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",

year = "2011",

language = "German",

type = "Patent",

note = "DE 10 2011 077 983A1",

}