Versatile N-type profile engineering by controlling arsenic surface segregation in silicon RPCVD

M. Popadić*, F. Sarubbi, T. L.M. Scholtes, L. K. Nanver

*Corresponding author for this work

Research output: Contribution to journalConference articleAcademicpeer-review

1 Citation (Scopus)


With the purpose of controlling the incorporation of arsenic during RPCVD Si epitaxy, the surface segregation of As during low-temperature epi growth was investigated. Parameters such as the Si growth rate, As deposition rate and As incorporation rate, which in previous models were either not evaluated or assumed to be constant, were found here to depend on both the As surface coverage and the arsine partial pressure. Knowledge of these dependencies was employed in simultaneous As deposition and Si epi growth to obtain highlycontrollable doping profiles by appropriate variation of the arsine partial pressure.

Original languageEnglish
Pages (from-to)393-399
Number of pages7
JournalECS transactions
Issue number1
Publication statusPublished - 1 Dec 2006
Externally publishedYes
Event21st International Symposium on Microelectronics Technology and Devices, SBMicro 2006 - Ouro Preto, Brazil
Duration: 28 Aug 20061 Sept 2006
Conference number: 21

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