Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

  • A. Šakić*
  • , L.K. Nanver
  • , G. van Veen
  • , K. Kooijman
  • , P. Vogelsang
  • , T.L.M. Scholtes
  • , W. de Boer
  • , W.H.A. Wien
  • , S. Milosavljević
  • , C.Th.H. Heerkens
  • , T. Knežević
  • , I. Spee
  • *Corresponding author for this work

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