Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

A. Šakić*, L.K. Nanver, G. van Veen, K. Kooijman, P. Vogelsang, T.L.M. Scholtes, W. de Boer, W.H.A. Wien, S. Milosavljević, C.Th.H. Heerkens, T. Knežević, I. Spee

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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