Versatile surface channel concept for microfluidic applications

Marcel Dijkstra, Meint J. de Boer, Johan W. Berenschot, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    65 Downloads (Pure)

    Abstract

    MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.
    Original languageUndefined
    Title of host publicationProceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006
    Place of PublicationSouthampton
    PublisherSouthampton University Press
    Pages37-40
    Number of pages4
    ISBN (Print)08543-2848-3
    Publication statusPublished - 3 Sep 2006
    Event17th Micromechanics Europe Workshop, MME 2006 - Southampton, United Kingdom
    Duration: 3 Sep 20065 Sep 2006
    Conference number: 17

    Publication series

    Name
    PublisherSouthampton University Press
    NumberIEEE Produ

    Conference

    Conference17th Micromechanics Europe Workshop, MME 2006
    Abbreviated titleMME
    CountryUnited Kingdom
    CitySouthampton
    Period3/09/065/09/06

    Keywords

    • EWI-9179
    • IR-66905
    • METIS-238773

    Cite this

    Dijkstra, M., de Boer, M. J., Berenschot, J. W., Lammerink, T. S. J., Wiegerink, R. J., & Elwenspoek, M. C. (2006). Versatile surface channel concept for microfluidic applications. In Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006 (pp. 37-40). Southampton: Southampton University Press.
    Dijkstra, Marcel ; de Boer, Meint J. ; Berenschot, Johan W. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Elwenspoek, Michael Curt. / Versatile surface channel concept for microfluidic applications. Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton : Southampton University Press, 2006. pp. 37-40
    @inproceedings{bb0b0b449c404802895e500668f744e2,
    title = "Versatile surface channel concept for microfluidic applications",
    abstract = "MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.",
    keywords = "EWI-9179, IR-66905, METIS-238773",
    author = "Marcel Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and Elwenspoek, {Michael Curt}",
    year = "2006",
    month = "9",
    day = "3",
    language = "Undefined",
    isbn = "08543-2848-3",
    publisher = "Southampton University Press",
    number = "IEEE Produ",
    pages = "37--40",
    booktitle = "Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006",

    }

    Dijkstra, M, de Boer, MJ, Berenschot, JW, Lammerink, TSJ, Wiegerink, RJ & Elwenspoek, MC 2006, Versatile surface channel concept for microfluidic applications. in Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton University Press, Southampton, pp. 37-40, 17th Micromechanics Europe Workshop, MME 2006, Southampton, United Kingdom, 3/09/06.

    Versatile surface channel concept for microfluidic applications. / Dijkstra, Marcel; de Boer, Meint J.; Berenschot, Johan W.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.

    Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton : Southampton University Press, 2006. p. 37-40.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Versatile surface channel concept for microfluidic applications

    AU - Dijkstra, Marcel

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - Lammerink, Theodorus S.J.

    AU - Wiegerink, Remco J.

    AU - Elwenspoek, Michael Curt

    PY - 2006/9/3

    Y1 - 2006/9/3

    N2 - MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.

    AB - MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.

    KW - EWI-9179

    KW - IR-66905

    KW - METIS-238773

    M3 - Conference contribution

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    BT - Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006

    PB - Southampton University Press

    CY - Southampton

    ER -

    Dijkstra M, de Boer MJ, Berenschot JW, Lammerink TSJ, Wiegerink RJ, Elwenspoek MC. Versatile surface channel concept for microfluidic applications. In Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006. Southampton: Southampton University Press. 2006. p. 37-40