Versatile surface channel concept for microfluidic applications

Marcel Dijkstra, Meint J. de Boer, Johan W. Berenschot, Theodorus S.J. Lammerink, Remco J. Wiegerink, Michael Curt Elwenspoek

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    MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.
    Original languageUndefined
    Title of host publicationProceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006
    Place of PublicationSouthampton
    PublisherSouthampton University Press
    Number of pages4
    ISBN (Print)08543-2848-3
    Publication statusPublished - 3 Sept 2006
    Event17th Micromechanics Europe Workshop, MME 2006 - Southampton, United Kingdom
    Duration: 3 Sept 20065 Sept 2006
    Conference number: 17

    Publication series

    PublisherSouthampton University Press
    NumberIEEE Produ


    Conference17th Micromechanics Europe Workshop, MME 2006
    Abbreviated titleMME
    Country/TerritoryUnited Kingdom


    • EWI-9179
    • IR-66905
    • METIS-238773

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