Abstract
MEMS fluidic devices often require the integration of sensor/actuator structures with freely suspended microchannels. This article presents a versatile microchannel fabrication concept, allowing for easy fluidic interfacing to the microchannel and integration of sensor/actuator structures in close proximity to the fluid. Several micro-fluidic device structures have been fabricated, demonstrating the concept.
Original language | Undefined |
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Title of host publication | Proceedings of the 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006 |
Place of Publication | Southampton |
Publisher | Southampton University Press |
Pages | 37-40 |
Number of pages | 4 |
ISBN (Print) | 08543-2848-3 |
Publication status | Published - 3 Sept 2006 |
Event | 17th Micromechanics Europe Workshop, MME 2006 - Southampton, United Kingdom Duration: 3 Sept 2006 → 5 Sept 2006 Conference number: 17 |
Publication series
Name | |
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Publisher | Southampton University Press |
Number | IEEE Produ |
Conference
Conference | 17th Micromechanics Europe Workshop, MME 2006 |
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Abbreviated title | MME |
Country/Territory | United Kingdom |
City | Southampton |
Period | 3/09/06 → 5/09/06 |
Keywords
- EWI-9179
- IR-66905
- METIS-238773