Vervaardiging en karakterisering van silicium oxynitride films t.b.v. planaire optische golfgeleiders

W.S. Bijlsma

Research output: Book/Report › Report › Professional

Original languageDutch
Place of PublicationEnschede
PublisherUniversiteit Twente
Publication statusPublished - 1 Jun 1990
Externally publishedYes

Keywords

  • METIS-133421

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