Vervaardiging en karakterisering van silicium oxynitride films t.b.v. planaire optische golfgeleiders

W.S. Bijlsma

Research output: Book/ReportReportProfessional

Original languageDutch
Place of PublicationEnschede
PublisherUniversiteit Twente
Publication statusPublished - 1 Jun 1990
Externally publishedYes

Keywords

  • METIS-133421

Cite this