Very low pressure oxidation of Si and Ge surfaces

I.D. Baikie

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 30 Nov 1990
EventMRS Fall Meeting 1990 - Boston, United States
Duration: 26 Nov 199030 Nov 1990

Conference

ConferenceMRS Fall Meeting 1990
CountryUnited States
CityBoston
Period26/11/9030/11/90

Keywords

  • METIS-132936

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