@conference{1c62af2f1729461284090bcf008ee805,
title = "Visualizing atomic details with the He Ion Microscope",
keywords = "METIS-291493",
author = "V. Veligura and G. Hlawacek and {van Gastel}, Raoul and Zandvliet, {Henricus J.W.} and Bene Poelsema",
year = "2012",
month = jan,
day = "16",
language = "English",
pages = "--",
note = "Physics@FOM Veldhoven 2012 : Tertiary Chemical interactions at the interfaces of Mo/B4C/Si/B4C multilayers upon low-temperature annealing ; Conference date: 17-01-2012 Through 18-01-2012",
}