W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V

A. Hasper, C. Kleijn, J. Holleman, J. Middelhoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationMaterials Research Society
Place of PublicationPittsburg, USA
Pages127-134
Number of pages8
Publication statusPublished - 1 Sep 1990

Keywords

  • METIS-114021

Cite this

Hasper, A., Kleijn, C., Holleman, J., & Middelhoek, J. (1990). W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. In Materials Research Society (pp. 127-134). Pittsburg, USA.
Hasper, A. ; Kleijn, C. ; Holleman, J. ; Middelhoek, J. / W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. Materials Research Society. Pittsburg, USA, 1990. pp. 127-134
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author = "A. Hasper and C. Kleijn and J. Holleman and J. Middelhoek",
year = "1990",
month = "9",
day = "1",
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Hasper, A, Kleijn, C, Holleman, J & Middelhoek, J 1990, W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. in Materials Research Society. Pittsburg, USA, pp. 127-134.

W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. / Hasper, A.; Kleijn, C.; Holleman, J.; Middelhoek, J.

Materials Research Society. Pittsburg, USA, 1990. p. 127-134.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V

AU - Hasper, A.

AU - Kleijn, C.

AU - Holleman, J.

AU - Middelhoek, J.

PY - 1990/9/1

Y1 - 1990/9/1

KW - METIS-114021

M3 - Conference contribution

SP - 127

EP - 134

BT - Materials Research Society

CY - Pittsburg, USA

ER -

Hasper A, Kleijn C, Holleman J, Middelhoek J. W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. In Materials Research Society. Pittsburg, USA. 1990. p. 127-134