W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V

A. Hasper, C.R. Kleijn, J. Holleman, J. Middelhoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationMaterials Research Society
    Place of PublicationPittsburg, USA
    Pages127-134
    Number of pages8
    Publication statusPublished - 1 Sep 1990

    Cite this

    Hasper, A., Kleijn, C. R., Holleman, J., & Middelhoek, J. (1990). W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V. In Materials Research Society (pp. 127-134). Pittsburg, USA.