W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V

A. Hasper, C.R. Kleijn, J. Holleman, J. Middelhoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

@inproceedings{876424ea6976456bb523edecda546c49,

title = "W-LPCVD step coverage and modelling in trenches and contact holes, tungsten and other advanced metals for VLSI/ULSI applications V",

author = "A. Hasper and C.R. Kleijn and J. Holleman and J. Middelhoek",

year = "1990",

month = sep,

day = "1",

language = "English",

pages = "127--134",

booktitle = "Materials Research Society",

}