Wafer Level Reliability Monitoring Strategy of an Advanced Multi-Process Foundry

Andrea Scarpa, Guoqiao Tao, Fred G. Kuper

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Title of host publication2003 IEEE International Reliability Physics Symposium proceedings
    Subtitle of host publication41st annual : Dallas, Texas, March 30-April 4, 2003
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages602-603
    Number of pages2
    ISBN (Print)0-7803-7649-8
    DOIs
    Publication statusPublished - 30 Mar 2003
    Event41st Annual IEEE International Reliability Physics Symposium, IRPS 2003 - Dallas, United States
    Duration: 30 Mar 20034 Apr 2003

    Conference

    Conference41st Annual IEEE International Reliability Physics Symposium, IRPS 2003
    Abbreviated titleIRPS
    CountryUnited States
    CityDallas
    Period30/03/034/04/03

    Keywords

    • METIS-215884

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