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Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond
Dirk Jonker*, Lucas Kooijman, Yasser Pordeli, Bernhard van der Wel, Erwin Berenschot, Bjorn Borgelink, Hai Le-The, Meint de Boer, Jan Eijkel, Ray Hueting, Roald Tiggelaar, Arie van Houselt, Han Gardeniers, Niels Tas
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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