Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond
- Dirk Jonker*
- , Lucas Kooijman
- , Yasser Pordeli
- , Bernhard van der Wel
- , Erwin Berenschot
- , Bjorn Borgelink
- , Hai Le-The
- , Meint de Boer
- , Jan Eijkel
- , Ray Hueting
- , Roald Tiggelaar
- , Arie van Houselt
- , Han Gardeniers
- , Niels Tas
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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