Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond

Dirk Jonker*, Lucas Kooijman, Yasser Pordeli, Bernhard van der Wel, Erwin Berenschot, Bjorn Borgelink, Hai Le-The, Meint de Boer, Jan Eijkel, Ray Hueting, Roald Tiggelaar, Arie van Houselt, Han Gardeniers, Niels Tas

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)
200 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond'. Together they form a unique fingerprint.

Physics

Chemistry

Material Science

Engineering

Chemical Engineering