Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

Hai  Le The; Jasper J.A. Lozeman; Johan G. Bomer; Duy Hien Tong; Erwin Berenschot; Albert  van den Berg; Mathieu  Odijk; Jan C.T. Eijkel

Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

Hai Le The, Jasper J.A. Lozeman, Johan G. Bomer, Duy Hien Tong, Erwin Berenschot, Albert van den Berg, Mathieu Odijk, Jan C.T. Eijkel

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.

Original language	English
Title of host publication	MicroTAS 2018
Subtitle of host publication	The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences
Editors	Fan-Gang Tseng, Gwo-Bin Lee
Publisher	The Chemical and Biological Microsystems Society
Pages	574-577
Number of pages	3
ISBN (Electronic)	978-0-578-40530-8
Publication status	Published - 11 Nov 2018
Event	22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018 - Kaohsiung Exhibition Center, Kaohsiung, Taiwan Duration: 10 Nov 2018 → 15 Nov 2018 Conference number: 22 https://cbmsociety.org/conferences/microtas2018/

Conference

Conference	22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018
Abbreviated title	MicroTAS 2018
Country/Territory	Taiwan
City	Kaohsiung
Period	10/11/18 → 15/11/18
Internet address	https://cbmsociety.org/conferences/microtas2018/

Keywords

PhableR 100C
Displacement Talbot lithography
Plasmonic substrates
Gold nanogaps

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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Le-The2018waferFinal published version, 2.79 MBLicence: Taverne

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Le The, H., Lozeman, J. J. A., Bomer, J. G., Tong, D. H., Berenschot, E., van den Berg, A., Odijk, M., & Eijkel, J. C. T. (2018). Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. In F.-G. Tseng, & G.-B. Lee (Eds.), MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 574-577). The Chemical and Biological Microsystems Society.

@inproceedings{de2ac3eb96e14bac96e11c9ae68d67d7,

title = "Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps",

abstract = "We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.",

keywords = "PhableR 100C, Displacement Talbot lithography, Plasmonic substrates, Gold nanogaps",

author = "{Le The}, Hai and Lozeman, {Jasper J.A.} and Bomer, {Johan G.} and Tong, {Duy Hien} and Erwin Berenschot and {van den Berg}, Albert and Mathieu Odijk and Eijkel, {Jan C.T.}",

year = "2018",

month = nov,

day = "11",

language = "English",

pages = "574--577",

editor = "Fan-Gang Tseng and Lee, {Gwo-Bin }",

booktitle = "MicroTAS 2018",

publisher = "The Chemical and Biological Microsystems Society",

note = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018, MicroTAS 2018 ; Conference date: 10-11-2018 Through 15-11-2018",

url = "https://cbmsociety.org/conferences/microtas2018/",

}

Le The, H, Lozeman, JJA , Bomer, JG, Tong, DH, Berenschot, E , van den Berg, A , Odijk, M & Eijkel, JCT 2018, Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. in F-G Tseng & G-B Lee (eds), MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society, pp. 574-577, 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018, Kaohsiung, Taiwan, 10/11/18.

Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. / Le The, Hai ; Lozeman, Jasper J.A.; Bomer, Johan G. et al.
MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. ed. / Fan-Gang Tseng; Gwo-Bin Lee. The Chemical and Biological Microsystems Society, 2018. p. 574-577.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

AU - Le The, Hai

AU - Lozeman, Jasper J.A.

AU - Bomer, Johan G.

AU - Tong, Duy Hien

AU - Berenschot, Erwin

AU - van den Berg, Albert

AU - Odijk, Mathieu

AU - Eijkel, Jan C.T.

N1 - Conference code: 22

PY - 2018/11/11

Y1 - 2018/11/11

N2 - We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.

AB - We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.

KW - PhableR 100C

KW - Displacement Talbot lithography

KW - Plasmonic substrates

KW - Gold nanogaps

M3 - Conference contribution

SP - 574

EP - 577

BT - MicroTAS 2018

A2 - Tseng, Fan-Gang

A2 - Lee, Gwo-Bin

PB - The Chemical and Biological Microsystems Society

T2 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018

Y2 - 10 November 2018 through 15 November 2018

ER -

Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

Abstract

Conference

Keywords

UN SDGs

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