Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.
Original languageEnglish
Title of host publicationMicroTAS 2018
Subtitle of host publicationThe 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences
EditorsFan-Gang Tseng, Gwo-Bin Lee
PublisherThe Chemical and Biological Microsystems Society
Pages574-577
Number of pages3
ISBN (Electronic)978-0-578-40530-8
Publication statusPublished - 11 Nov 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018 - Kaohsiung Exhibition Center, Kaohsiung, Taiwan, Province of China
Duration: 10 Nov 201815 Nov 2018
Conference number: 22
https://cbmsociety.org/conferences/microtas2018/

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018
Abbreviated titleMicroTAS 2018
CountryTaiwan, Province of China
CityKaohsiung
Period10/11/1815/11/18
Internet address

Fingerprint

etching
wafers
gold
fabrication
lithography
augmentation
thin films
molecules

Keywords

  • PhableR 100C
  • Displacement Talbot lithography
  • Plasmonic substrates
  • Gold nanogaps

Cite this

Le The, H., Lozeman, J. J. A., Bomer, J. G., Tong, H. D., Berenschot, E., van den Berg, A., ... Eijkel, J. C. T. (2018). Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. In F-G. Tseng, & G-B. Lee (Eds.), MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 574-577). The Chemical and Biological Microsystems Society.
Le The, Hai ; Lozeman, Jasper J.A. ; Bomer, Johan G. ; Tong, Hien Duy ; Berenschot, Erwin ; van den Berg, Albert ; Odijk, Mathieu ; Eijkel, Jan C.T. / Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. editor / Fan-Gang Tseng ; Gwo-Bin Lee. The Chemical and Biological Microsystems Society, 2018. pp. 574-577
@inproceedings{de2ac3eb96e14bac96e11c9ae68d67d7,
title = "Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps",
abstract = "We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.",
keywords = "PhableR 100C, Displacement Talbot lithography, Plasmonic substrates, Gold nanogaps",
author = "{Le The}, Hai and Lozeman, {Jasper J.A.} and Bomer, {Johan G.} and Tong, {Hien Duy} and Erwin Berenschot and {van den Berg}, Albert and Mathieu Odijk and Eijkel, {Jan C.T.}",
year = "2018",
month = "11",
day = "11",
language = "English",
pages = "574--577",
editor = "Fan-Gang Tseng and Lee, {Gwo-Bin }",
booktitle = "MicroTAS 2018",
publisher = "The Chemical and Biological Microsystems Society",

}

Le The, H, Lozeman, JJA, Bomer, JG, Tong, HD, Berenschot, E, van den Berg, A, Odijk, M & Eijkel, JCT 2018, Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. in F-G Tseng & G-B Lee (eds), MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society, pp. 574-577, 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2018, Kaohsiung, Taiwan, Province of China, 10/11/18.

Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. / Le The, Hai ; Lozeman, Jasper J.A.; Bomer, Johan G.; Tong, Hien Duy; Berenschot, Erwin; van den Berg, Albert ; Odijk, Mathieu ; Eijkel, Jan C.T.

MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. ed. / Fan-Gang Tseng; Gwo-Bin Lee. The Chemical and Biological Microsystems Society, 2018. p. 574-577.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps

AU - Le The, Hai

AU - Lozeman, Jasper J.A.

AU - Bomer, Johan G.

AU - Tong, Hien Duy

AU - Berenschot, Erwin

AU - van den Berg, Albert

AU - Odijk, Mathieu

AU - Eijkel, Jan C.T.

PY - 2018/11/11

Y1 - 2018/11/11

N2 - We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.

AB - We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality sub-10 nm gold displacement Talbot lithography (DTL) based shrink-etching technique [1] with dry etching, wet etching, and thin film deposition techniques. The fabricated Au nanogaps showed a significant enhancement of SERS signals of benzenethiol (BT) molecules chemisorbed on the structure surface.

KW - PhableR 100C

KW - Displacement Talbot lithography

KW - Plasmonic substrates

KW - Gold nanogaps

M3 - Conference contribution

SP - 574

EP - 577

BT - MicroTAS 2018

A2 - Tseng, Fan-Gang

A2 - Lee, Gwo-Bin

PB - The Chemical and Biological Microsystems Society

ER -

Le The H, Lozeman JJA, Bomer JG, Tong HD, Berenschot E, van den Berg A et al. Wafer-scale fabrication of high-quality sub-10 nm gold nanogaps. In Tseng F-G, Lee G-B, editors, MicroTAS 2018: The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society. 2018. p. 574-577