Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications

D. Jonker*, Z. Jafari, J. P. Winczewski, C. Eyovge, J. W. Berenschot, N. R. Tas, J. G.E. Gardeniers, I. De Leon, A. Susarrey-Arce

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


Combined hybrid lithography and sputter redeposition enable reproducible wafer-scale fabrication of gold hollow nanopillars with relatively large field enhancement verified both numerically and experimentally. The application of such structures is demonstrated with surfaceenhanced Raman scattering (SERS).

Original languageEnglish
Title of host publicationNovel Optical Materials and Applications, NOMA 2020
PublisherOptical Society of America
VolumePart F186-NOMA 2020
ISBN (Electronic)978-1-943580-79-8
Publication statusPublished - 2020
EventNovel Optical Materials and Applications, NOMA 2020 - Virtual Event, Washington, United States
Duration: 13 Jul 202016 Jul 2020


ConferenceNovel Optical Materials and Applications, NOMA 2020
Abbreviated titleNOMA 2020
Country/TerritoryUnited States

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