Wafer-scale nanostructure formation inside vertical nano-pores

J. W. Berenschot; Xingwu  Sun; H. Le The; R. M. Tiggelaar; M. J. de Boer; J. C. T. Eijkel; J. G. E. Gardeniers; N. R. Tas; E. Sarajlic

Wafer-scale nanostructure formation inside vertical nano-pores

J. W. Berenschot, Xingwu Sun, H. Le The, R. M. Tiggelaar, M. J. de Boer, J. C. T. Eijkel, J. G. E. Gardeniers, N. R. Tas, E. Sarajlic

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

4 Citations (Scopus)

309 Downloads (Pure)

Abstract

We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

Original language	English
Title of host publication	IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	978-1-5090-3059-0
ISBN (Print)	978-1-5090-3060-6
Publication status	Published - Apr 2017
Event	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - UCLA Meyer & Renee Luskin Conference Center, Los Angeles, United States Duration: 9 Apr 2017 → 12 Apr 2017 Conference number: 12

Publication series

Name	IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher	IEEE
ISSN (Print)	2474-3755

Conference

Conference	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Abbreviated title	NEMS
Country/Territory	United States
City	Los Angeles
Period	9/04/17 → 12/04/17

Keywords

Nano-pores
membrane
corner lithography
anisotropic etching
conformal deposition

Access to Document

wafer-scaleFinal published version, 683 KB

Cite this

Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., Gardeniers, J. G. E., Tas, N. R., & Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. In IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017) (IEEE International Conference on Nano/Micro Engineered and Molecular Systems). IEEE.

@inproceedings{b521f85c27de4d579e0965d4dc414d65,

title = "Wafer-scale nanostructure formation inside vertical nano-pores",

abstract = "We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.",

keywords = "Nano-pores, membrane, corner lithography, anisotropic etching, conformal deposition",

author = "Berenschot, {J. W.} and Xingwu Sun and The, {H. Le} and Tiggelaar, {R. M.} and {de Boer}, {M. J.} and Eijkel, {J. C. T.} and Gardeniers, {J. G. E.} and Tas, {N. R.} and E. Sarajlic",

year = "2017",

month = apr,

language = "English",

isbn = "978-1-5090-3060-6",

series = "IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

publisher = "IEEE",

booktitle = "IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)",

address = "United States",

note = "12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, NEMS ; Conference date: 09-04-2017 Through 12-04-2017",

}

Berenschot, JW, Sun, X, The, HL, Tiggelaar, RM, de Boer, MJ, Eijkel, JCT , Gardeniers, JGE , Tas, NR & Sarajlic, E 2017, Wafer-scale nanostructure formation inside vertical nano-pores. in IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE, Piscataway, NJ, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, California, United States, 9/04/17.

Wafer-scale nanostructure formation inside vertical nano-pores. / Berenschot, J. W.; Sun, Xingwu ; The, H. Le et al.
IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). Piscataway, NJ: IEEE, 2017. (IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Wafer-scale nanostructure formation inside vertical nano-pores

AU - Berenschot, J. W.

AU - Sun, Xingwu

AU - The, H. Le

AU - Tiggelaar, R. M.

AU - de Boer, M. J.

AU - Eijkel, J. C. T.

AU - Gardeniers, J. G. E.

AU - Tas, N. R.

AU - Sarajlic, E.

N1 - Conference code: 12

PY - 2017/4

Y1 - 2017/4

N2 - We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

AB - We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

KW - Nano-pores

KW - membrane

KW - corner lithography

KW - anisotropic etching

KW - conformal deposition

M3 - Conference contribution

SN - 978-1-5090-3060-6

T3 - IEEE International Conference on Nano/Micro Engineered and Molecular Systems

BT - IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)

PB - IEEE

CY - Piscataway, NJ

T2 - 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Y2 - 9 April 2017 through 12 April 2017

ER -

Wafer-scale nanostructure formation inside vertical nano-pores

Abstract

Publication series

Conference

Keywords

Access to Document

Fingerprint

Cite this