Wafer-scale nanostructure formation inside vertical nano-pores

J. W. Berenschot; Xingwu  Sun; H. Le The; R. M. Tiggelaar; M. J. de Boer; J. C. T. Eijkel; J. G. E. Gardeniers; N. R. Tas; E. Sarajlic

Wafer-scale nanostructure formation inside vertical nano-pores

J. W. Berenschot
, Xingwu Sun
, H. Le The
, R. M. Tiggelaar
, M. J. de Boer
, J. C. T. Eijkel
, J. G. E. Gardeniers
, N. R. Tas
, E. Sarajlic

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

4 Citations (Scopus)

411 Downloads (Pure)

Abstract

We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

Original language	English
Title of host publication	IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	978-1-5090-3059-0
ISBN (Print)	978-1-5090-3060-6
Publication status	Published - Apr 2017
Event	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - UCLA Meyer & Renee Luskin Conference Center, Los Angeles, United States Duration: 9 Apr 2017 → 12 Apr 2017 Conference number: 12

Publication series

Name	IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher	IEEE
ISSN (Print)	2474-3755

Conference

Conference	12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017
Abbreviated title	NEMS
Country/Territory	United States
City	Los Angeles
Period	9/04/17 → 12/04/17

Keywords

Nano-pores
membrane
corner lithography
anisotropic etching
conformal deposition

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Berenschot, J. W., Sun, X., The, H. L., Tiggelaar, R. M., de Boer, M. J., Eijkel, J. C. T., Gardeniers, J. G. E., Tas, N. R., & Sarajlic, E. (2017). Wafer-scale nanostructure formation inside vertical nano-pores. In IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017) (IEEE International Conference on Nano/Micro Engineered and Molecular Systems). IEEE.

@inproceedings{b521f85c27de4d579e0965d4dc414d65,

title = "Wafer-scale nanostructure formation inside vertical nano-pores",

abstract = "We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.",

keywords = "Nano-pores, membrane, corner lithography, anisotropic etching, conformal deposition",

author = "Berenschot, \{J. W.\} and Xingwu Sun and The, \{H. Le\} and Tiggelaar, \{R. M.\} and \{de Boer\}, \{M. J.\} and Eijkel, \{J. C. T.\} and Gardeniers, \{J. G. E.\} and Tas, \{N. R.\} and E. Sarajlic",

year = "2017",

month = apr,

language = "English",

isbn = "978-1-5090-3060-6",

series = "IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

publisher = "IEEE",

booktitle = "IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)",

address = "United States",

note = "12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, NEMS ; Conference date: 09-04-2017 Through 12-04-2017",

}

Berenschot, JW, Sun, X, The, HL, Tiggelaar, RM, de Boer, MJ, Eijkel, JCT , Gardeniers, JGE , Tas, NR & Sarajlic, E 2017, Wafer-scale nanostructure formation inside vertical nano-pores. in IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE, Piscataway, NJ, 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, California, United States, 9/04/17.

Wafer-scale nanostructure formation inside vertical nano-pores. / Berenschot, J. W.; Sun, Xingwu ; The, H. Le et al.
IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017). Piscataway, NJ: IEEE, 2017. (IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Wafer-scale nanostructure formation inside vertical nano-pores

AU - Berenschot, J. W.

AU - Sun, Xingwu

AU - The, H. Le

AU - Tiggelaar, R. M.

AU - de Boer, M. J.

AU - Eijkel, J. C. T.

AU - Gardeniers, J. G. E.

AU - Tas, N. R.

AU - Sarajlic, E.

N1 - Conference code: 12

PY - 2017/4

Y1 - 2017/4

N2 - We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

AB - We propose a wafer-scale technique for nanostructure formation inside vertically oriented, through-membrane nano-pores. It uses 50 nm monocrystalline silicon pillars as a mold, embedded in a silicon nitride membrane formed in an innovative step. The proposed technique paves the way towards advanced functionalization of parallel oriented nano-pores for actuation, sensing, filtering/trapping purposes.

KW - Nano-pores

KW - membrane

KW - corner lithography

KW - anisotropic etching

KW - conformal deposition

M3 - Conference contribution

SN - 978-1-5090-3060-6

T3 - IEEE International Conference on Nano/Micro Engineered and Molecular Systems

BT - IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2017)

PB - IEEE

CY - Piscataway, NJ

T2 - 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

Y2 - 9 April 2017 through 12 April 2017

ER -

Wafer-scale nanostructure formation inside vertical nano-pores

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Keywords

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