Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules

H.T.H. Hoang Thi Hanh, H.D. Tong, Gezina M.J. Segers-Nolten, Niels Roelof Tas, Vinod Subramaniam, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Abstract

We present a new and simple approach to fabricate wafer-scale, thin encapsulated, two-dimensional nanochannels by using conventional surface-micromachining technology and thin-film evaporation. The key steps to the realization of two-dimensional nanochannels are a fine etching of a sacrificial layer to create underetching spaces at the nanometer regime, and an accurate thin-film evaporation for encapsulation. Well-defined cross-sectional, encapsulated nanochannel arrays with dimensions as small as 20 nm in both width and height have been realized at the wafer-scale. The fabricated nanochannels with a channel length of 10 mm have been used as a suitable fluidic platform for confining a solution containing nanomolar concentrations of Alexa fluorescent molecules. Initial results toward visualization of single Alexa molecules in the confined solution are reported.
Original languageEnglish
Pages (from-to)455-459
Number of pages5
JournalJournal of colloid and interface science
Volume367
Issue number1
DOIs
Publication statusPublished - 1 Feb 2012

Keywords

  • EWI-20986

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