Wafer-through access trenches for surface channel technology

Jarno Groenesteijn, Meint J. de Boer, Theodorus S.J. Lammerink, Joost Conrad Lötters, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    2 Downloads (Pure)

    Abstract

    A new method to integrate fluidic access to devices made by surface channel technology is proposed. The method uses a high aspect-ratio DRIE process for etching wafer through trenches to allow access to the front side of the surface channel device. LPCVD of TEOS is used as etch-stop and to define a reliable connection between channel and access trench during fabrication. The resulting connection is robust and increases design freedom for the surface channel technology. The complete fluid path has only one wetting material.
    Original languageUndefined
    Title of host publication1st International Conference on Microfluidic Handling Systems
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Pages-
    Number of pages2
    ISBN (Print)not assigned
    Publication statusPublished - 10 Oct 2012
    Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
    Duration: 10 Oct 201212 Oct 2012
    Conference number: 1
    https://www.utwente.nl/en/eemcs/mfhs2012/

    Publication series

    Name
    PublisherUniversity of Twente

    Conference

    Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
    Abbreviated titleMFHS
    CountryNetherlands
    CityEnschede
    Period10/10/1212/10/12
    Internet address

    Keywords

    • METIS-293279
    • EWI-22802
    • Surface channel technology
    • IR-83556
    • access holes

    Cite this

    Groenesteijn, J., de Boer, M. J., Lammerink, T. S. J., Lötters, J. C., & Wiegerink, R. J. (2012). Wafer-through access trenches for surface channel technology. In 1st International Conference on Microfluidic Handling Systems (pp. -). Enschede: University of Twente.
    Groenesteijn, Jarno ; de Boer, Meint J. ; Lammerink, Theodorus S.J. ; Lötters, Joost Conrad ; Wiegerink, Remco J. / Wafer-through access trenches for surface channel technology. 1st International Conference on Microfluidic Handling Systems. Enschede : University of Twente, 2012. pp. -
    @inproceedings{1c7389efdbdc4285be110fe50a1d24ca,
    title = "Wafer-through access trenches for surface channel technology",
    abstract = "A new method to integrate fluidic access to devices made by surface channel technology is proposed. The method uses a high aspect-ratio DRIE process for etching wafer through trenches to allow access to the front side of the surface channel device. LPCVD of TEOS is used as etch-stop and to define a reliable connection between channel and access trench during fabrication. The resulting connection is robust and increases design freedom for the surface channel technology. The complete fluid path has only one wetting material.",
    keywords = "METIS-293279, EWI-22802, Surface channel technology, IR-83556, access holes",
    author = "Jarno Groenesteijn and {de Boer}, {Meint J.} and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
    note = "http://www.utwente.nl/ewi/mfhs2012/MFHS2012{\%}20Proceedings.pdf",
    year = "2012",
    month = "10",
    day = "10",
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    isbn = "not assigned",
    publisher = "University of Twente",
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    }

    Groenesteijn, J, de Boer, MJ, Lammerink, TSJ, Lötters, JC & Wiegerink, RJ 2012, Wafer-through access trenches for surface channel technology. in 1st International Conference on Microfluidic Handling Systems. University of Twente, Enschede, pp. -, 1st International Conference on MicroFluidic Handling Systems, MFHS 2012, Enschede, Netherlands, 10/10/12.

    Wafer-through access trenches for surface channel technology. / Groenesteijn, Jarno; de Boer, Meint J.; Lammerink, Theodorus S.J.; Lötters, Joost Conrad; Wiegerink, Remco J.

    1st International Conference on Microfluidic Handling Systems. Enschede : University of Twente, 2012. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    TY - GEN

    T1 - Wafer-through access trenches for surface channel technology

    AU - Groenesteijn, Jarno

    AU - de Boer, Meint J.

    AU - Lammerink, Theodorus S.J.

    AU - Lötters, Joost Conrad

    AU - Wiegerink, Remco J.

    N1 - http://www.utwente.nl/ewi/mfhs2012/MFHS2012%20Proceedings.pdf

    PY - 2012/10/10

    Y1 - 2012/10/10

    N2 - A new method to integrate fluidic access to devices made by surface channel technology is proposed. The method uses a high aspect-ratio DRIE process for etching wafer through trenches to allow access to the front side of the surface channel device. LPCVD of TEOS is used as etch-stop and to define a reliable connection between channel and access trench during fabrication. The resulting connection is robust and increases design freedom for the surface channel technology. The complete fluid path has only one wetting material.

    AB - A new method to integrate fluidic access to devices made by surface channel technology is proposed. The method uses a high aspect-ratio DRIE process for etching wafer through trenches to allow access to the front side of the surface channel device. LPCVD of TEOS is used as etch-stop and to define a reliable connection between channel and access trench during fabrication. The resulting connection is robust and increases design freedom for the surface channel technology. The complete fluid path has only one wetting material.

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    KW - EWI-22802

    KW - Surface channel technology

    KW - IR-83556

    KW - access holes

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    BT - 1st International Conference on Microfluidic Handling Systems

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    Groenesteijn J, de Boer MJ, Lammerink TSJ, Lötters JC, Wiegerink RJ. Wafer-through access trenches for surface channel technology. In 1st International Conference on Microfluidic Handling Systems. Enschede: University of Twente. 2012. p. -