Wavefront correction in the extreme ultraviolet wavelength range using piezoelectric thin films

Muharrem Bayraktar*, Anuj Chopra, Guus Rijnders, Klaus Boller, Fred Bijkerk

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

7 Citations (Scopus)
77 Downloads (Pure)

Abstract

A new scheme for wavefront correction in the extreme ultraviolet wavelength range is presented. The central feature of the scheme is the successful growth of crystalline piezoelectric thin films with the desired orientation on an amorphous glass substrate. The piezoelectric films show a high piezoelectric coefficient of 250 pm/V. Using wavefront calculations we show that the grown films would enable high-quality wavefront correction, based on a stroke of 25 nm, with voltages that are well below the electrical breakdown limit of the piezoelectric film.
Original languageEnglish
Pages (from-to)30623-30632
JournalOptics express
Volume22
Issue number25
DOIs
Publication statusPublished - 2014

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