Waveguide-coupled micro-ball lens array suitable for mass fabrication

Lantian Chang, Meindert Dijkstra, Nur Ismail, Markus Pollnau, René M. de Ridder, Kerstin Wörhoff, Vinod Subramaniam, Johannes S. Kanger

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

We demonstrate a fabrication procedure for the direct integration of micro-ball lenses on planar integrated optical channel waveguide chips with the aim to reduce the divergence of light that arises from the waveguide in both horizontal and vertical directions. Fabrication of the lenses is based on photoresist reflow which is a procedure that allows for the use of photolithography for careful alignment of the lenses with respect to the waveguides and enables mass production. We present in detail the design and fabrication procedures. Optical characterization of the fabricated micro-ball lenses demonstrates a good performance in terms of beam-size reduction and beam shape. The beam half divergence angle of 1544 nm light is reduced from 12.4° to 1.85°.
Original languageEnglish
Pages (from-to)22414-22423
Number of pages10
JournalOptics express
Volume23
Issue number17
DOIs
Publication statusPublished - Aug 2015

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balls
lenses
waveguides
fabrication
divergence
photolithography
photoresists
chips
alignment

Keywords

  • Micro-optical devices
  • Integrated optics
  • IOMS-SNS: SENSORS
  • Integrated optics devices

Cite this

Chang, Lantian ; Dijkstra, Meindert ; Ismail, Nur ; Pollnau, Markus ; de Ridder, René M. ; Wörhoff, Kerstin ; Subramaniam, Vinod ; Kanger, Johannes S. / Waveguide-coupled micro-ball lens array suitable for mass fabrication. In: Optics express. 2015 ; Vol. 23, No. 17. pp. 22414-22423.
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Chang, L, Dijkstra, M, Ismail, N, Pollnau, M, de Ridder, RM, Wörhoff, K, Subramaniam, V & Kanger, JS 2015, 'Waveguide-coupled micro-ball lens array suitable for mass fabrication', Optics express, vol. 23, no. 17, pp. 22414-22423. https://doi.org/10.1364/OE.23.022414

Waveguide-coupled micro-ball lens array suitable for mass fabrication. / Chang, Lantian; Dijkstra, Meindert; Ismail, Nur; Pollnau, Markus; de Ridder, René M.; Wörhoff, Kerstin; Subramaniam, Vinod; Kanger, Johannes S.

In: Optics express, Vol. 23, No. 17, 08.2015, p. 22414-22423.

Research output: Contribution to journalArticleAcademicpeer-review

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AU - Chang, Lantian

AU - Dijkstra, Meindert

AU - Ismail, Nur

AU - Pollnau, Markus

AU - de Ridder, René M.

AU - Wörhoff, Kerstin

AU - Subramaniam, Vinod

AU - Kanger, Johannes S.

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KW - Integrated optics

KW - IOMS-SNS: SENSORS

KW - Integrated optics devices

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