Ways to monitor EUV induced carbon contamination of optics

Juequan Chen, Eric Louis, Frederik Bijkerk, Christopher James Lee, Herbert Wormeester, R. Kunze, Holger Schmidt, D. Schneider, R. Moors

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 20 Jan 2009
EventPhysics@FOM Veldhoven 2009 - NH Koningshof, Veldhoven, Netherlands
Duration: 20 Jan 200921 Jan 2009

Conference

ConferencePhysics@FOM Veldhoven 2009
CountryNetherlands
CityVeldhoven
Period20/01/0921/01/09

Keywords

  • METIS-271371

Cite this