Wet and dry etching techniques for the release of sub-micrometre perforated membranes

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Contribution to journal › Article › Academic › peer-review

    29 Citations (Scopus)
    13 Downloads (Pure)

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